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Spectroscopy of mechanical dissipation in micro-mechanical membranes

Wed, 2013-04-03 11:30 - Mattia Giardini
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Date: 
2011-10-05
Author(s): 

A. Jöckel, M. T. Rakher, M. Korppi, S. Camerer, D. Hunger, M. Mader, and P. Treutlein

Reference: 

Appl. Phys. Lett. 99, 143109 (2011); http://dx.doi.org/10.1063/1.3646914

We measure the frequency dependence of the mechanical quality factor (Q) of SiN membrane oscillators and observe a resonant variation of Q by more than two orders of magnitude. The frequency of the fundamental mechanical mode is tuned reversibly by up to 40% through local heating with a laser. Several distinct resonances in Q are observed that can be explained by coupling to membrane frame modes. Away from the resonances, the background Q is independent of frequency and temperature in the measured range.