Home › Content

Etching suspended superconducting hybrid junctions from a multilayer

Tue, 2013-11-19 00:02 - Lukas Hanschke
Printer-friendly versionSend by emailPDF version
Date: 
2012-06-22
Author(s): 

H. Q. Nguyen, L. M. A. Pascal, Z. H. Peng, O. Buisson , B. Gilles, C. Winkelmann , H. Courtois

Reference: 

Appl. Phys. Lett. 100, 252602 (2012)

URL: 

http://scitation.aip.org/content/aip/journal/apl/100/25/10.1063/1.4729779

A method to fabricate large-area superconducting hybrid tunnel junctions with a suspended central normal metal part is presented. The samples are fabricated by combining photo-lithography and chemical etch of a superconductor—insulator—normal metalmultilayer. The process involves few fabrication steps, is reliable and produces extremely high-quality tunnel junctions. Under an appropriate voltage bias, a significant electronic cooling is demonstrated. We analyze semi-quantitatively the thermal behavior of a typical device.