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Etching suspended superconducting hybrid junctions from a multilayer

Wed, 2012-03-21 21:21 - Lukas Hanschke
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Date: 
2011-11-15
Author(s): 

H. Q. Nguyen, L. M. A. Pascal, Z. H. Peng, O. Buisson , B. Gilles, C. Winkelmann , H. Courtois

Reference: 

arXiv:1111.3541

URL: 

http://arxiv.org/abs/1111.3541

A novel method to fabricate large-area superconducting hybrid tunnel junctions with a suspended central normal metal part is presented. The samples are fabricated by combining photo-lithography and chemical etch of a superconductor - insulator - normal metal multilayer. The process involves few fabrication steps, is reliable and produces extremely high-quality tunnel junctions. Under an appropriate voltage bias, a significant electronic cooling is demonstrated.