Nanoelectronics and Nanotechnology Research Group at the University of Southampton

Printer-friendly versionSend by emailPDF version
Research Type: 

Our expertise is to fabricate various nano-electronic devices using our £120M clean room complex, the Southampton Nanofabrication Centre ( opened in 2009, one of the best university-based fabrication facilities in Europe. The cleanroom supports cutting-edge research activities in nano-electronics, photonics, and fibre optics. The full CMOS front-end and backend process tools are available for 6-inch wafers. The main fabrication tools include optical lithography, E-beam lithography, ALD, CAT-CVD, PECVD, LPCVD, HWCVD, ICP/RIE etcher, furnaces, dicer, wafer bonder, sputters and evaporators. An extensive range of characterization tools was also installed including FIB, SEM, HIM, AFM, FTIR, Raman and the high-speed electrical testing probe station. These state-of-the-art facilities will allow fast fabrication turnaround time under excellent control over the fabrication processes comparable with industrial standards to allow for new manufacturing process developments. In Sep. 2013, the University announced the launch of the new Zepler Institute (Director: Professor Sir David Payne) to bring the related expertise at the University working for manufacturing industries, and established the largest photonics and electronics institute in the UK, comprising of 350 staffs and PhD students. Therefore, the University of Southampton is one of the most ideal research organisations to explore the new frontier of manufacturing, since the synergies between photonics and electronics researchers are encouraged and supported by the governance at the highest level in the University. 

Professor Shinichi Saito


University of Southampton Southampton
United Kingdom
50° 54' 34.92" N, 1° 24' 15.6636" W
Javascript is required to view this map.